There are many types of mechanical sensors, such as resistance strain gauge pressure sensors, semiconductor strain gauge pressure sensors, piezoresistive pressure sensors, inductive pressure sensors, capacitive pressure sensors, resonant pressure sensors and capacitive acceleration sensors.
Types of Pressure Sensors There are many types of mechanical sensors, such as resistance strain gauge pressure sensors, semiconductor strain gauge pressure sensors, piezoresistive pressure sensors, inductive pressure sensors, capacitive pressure sensors, resonant pressure sensors, and capacitive acceleration sensors. But the most widely used is a piezoresistive pressure sensor, which has a very low price, high precision and good linearity. When we understand the piezoresistive force sensor, we first understand the components of the resistance strain gauge. A strain gage is a sensitive device that converts the strain change on the device under test into an electrical signal. It is one of the main components of a piezoresistive strain sensor. The most widely used resistance strain gauges are metal resistance strain gauges and semiconductor strain gauges. The metal resistance strain gauge has two kinds of filament strain gauges and metal foil strain gauges. Usually, the strain gauge is tightly bonded to the mechanical strain matrix by a special adhesive. When the stress changes due to the force of the substrate, the strain gauges are also deformed together, so that the resistance of the strain gauge is changed, thereby The voltage applied to the resistor changes. The strain gauges typically have a small change in resistance when stressed. Typically, such strain gauges form a strain bridge and are amplified by a subsequent instrumentation amplifier and transmitted to the processing circuit (usually A/D conversion). And CPU) display or actuator.
The internal structure of the metal strain gauge is composed of a base material, a metal strain wire or a strained foil, an insulating protective sheet, and a lead wire. Depending on the application, the resistance of the strain gauge can be designed by the designer, but the range of resistance should be noted: the resistance is too small, the required drive current is too large, and the heat of the strain gauge causes the temperature to be too high. Used in different environments, the resistance value of the strain gauge is changed too much, the output zero drift is obvious, and the zero adjustment circuit is too complicated. The resistance is too large, the impedance is too high, and the ability to resist external electromagnetic interference is poor. Generally, it is about tens of euros to several tens of kiloohms.
The working principle of the resistance strain gauge The working principle of the metal resistance strain gauge is the phenomenon that the strain resistance adsorbed on the base material changes with the mechanical deformation, which is commonly known as the resistance strain effect. The resistance value of the metal conductor can be expressed by the following formula: where: ρ - the resistivity of the metal conductor (Ω · cm 2 / m) S - the cross-sectional area of ​​the conductor (cm 2 ) L - the length of the conductor (m) As an example of wire strain resistance, when the wire is subjected to an external force, its length and cross-sectional area will change. It can be easily seen from the above formula that the resistance value will change if the wire is stretched by an external force. When the length is increased and the cross-sectional area is decreased, the resistance value is increased. When the wire is compressed by an external force, the length is decreased and the section is increased, and the resistance value is decreased. As long as the change in resistance is measured (usually the voltage across the measured resistance), the strain of the strained wire can be obtained.
The principle of ceramic pressure sensor and the application of corrosion-resistant ceramic pressure sensor have no liquid transfer. The pressure acts directly on the front surface of the ceramic diaphragm, causing the diaphragm to produce a slight deformation. The thick film resistor is printed on the back of the ceramic diaphragm and connected into one. The Wheatstone bridge (closed bridge), due to the piezoresistive effect of the varistor, causes the bridge to generate a highly linear voltage signal proportional to the pressure, which is proportional to the excitation voltage. The standard signal is calibrated according to the pressure range. It is compatible with strain gauge sensors at 2.0 / 3.0 / 3.3 mV/V. With laser calibration, the sensor has high temperature stability and time stability. The sensor comes with temperature compensation of 0 to 70 ° C and can be in direct contact with most media. Ceramic is a recognized material that is highly elastic, resistant to corrosion, abrasion, shock and vibration. The thermal stability of ceramics and its thick film resistance allow it to operate over a temperature range of -40 to 135 ° C, with high precision and high stability. The degree of electrical insulation is >2kV, the output signal is strong, and the long-term stability is good. High-performance, low-priced ceramic sensors will be the development direction of pressure sensors. There is a trend to replace other types of sensors in Europe and the United States. More and more users in China use ceramic sensors instead of diffused silicon pressure sensors.
The wide variety of sensors available on the market today allows design engineers to select the pressure sensors required for their system. These sensors include both the most basic converters and the more complex high-integration sensors with on-chip circuitry. Because of these differences, design engineers must compensate for the measurement error of the pressure sensor as much as possible, which is an important step in ensuring that the sensor meets the design and application requirements. In some cases, compensation also improves the overall performance of the sensor in the application.
There are many types of mechanical sensors, such as resistance strain gauge pressure sensors, semiconductor strain gauge pressure sensors, piezoresistive pressure sensors, inductive pressure sensors, capacitive pressure sensors, resonant pressure sensors and capacitive acceleration sensors. But the most widely used is a piezoresistive pressure sensor, which has a very low price, high precision and good linearity.
When we understand the piezoresistive force sensor, we first understand the components of the resistance strain gauge. A strain gage is a sensitive device that converts the strain change on the device under test into an electrical signal. It is one of the main components of a piezoresistive strain sensor. The most widely used resistance strain gauges are metal resistance strain gauges and semiconductor strain gauges. The metal resistance strain gauge has two kinds of filament strain gauges and metal foil strain gauges. Usually, the strain gauge is tightly bonded to the mechanical strain matrix by a special adhesive. When the stress changes due to the force of the substrate, the strain gauges are also deformed together, so that the resistance of the strain gauge is changed, thereby The voltage applied to the resistor changes. The strain gauges typically have a small change in resistance when stressed. Typically, such strain gauges form a strain bridge and are amplified by a subsequent instrumentation amplifier and transmitted to the processing circuit (usually A/D conversion). And CPU) display or actuator.
Internal structure of metal resistance strain gauge:
It consists of a base material, a metal strained wire or a strained foil, an insulating protective sheet, and a lead wire. Depending on the application, the resistance of the strain gauge can be designed by the designer, but the range of resistance should be noted: the resistance is too small, the required drive current is too large, and the heat of the strain gauge causes the temperature to be too high. Used in different environments, the resistance value of the strain gauge is changed too much, the output zero drift is obvious, and the zero adjustment circuit is too complicated. The resistance is too large, the impedance is too high, and the ability to resist external electromagnetic interference is poor. Generally, it is about tens of euros to several tens of kiloohms.

The working principle of the resistance strain gauge:
The working principle of the metal resistance strain gauge is a phenomenon in which the strain resistance adsorbed on the base material changes with the mechanical deformation, which is commonly called the resistance strain effect. The resistance value of the metal conductor can be expressed by the following formula:

Where: ρ——resistivity of metal conductor (Ω·cm2/m)

S——cross-sectional area of ​​the conductor (cm2)

L——the length of the conductor (m)

Taking wire strain resistance as an example, when the wire is subjected to an external force, its length and cross-sectional area will change. It can be easily seen from the above formula that the resistance value will change if the wire is subjected to an external force. When it is stretched, its length increases, and the cross-sectional area decreases, and the resistance value increases. When the wire is compressed by an external force, the length is decreased and the section is increased, and the resistance value is decreased. As long as the change in resistance is measured (usually the voltage across the measured resistance), the strain of the strained wire can be obtained.

Principle and application of ceramic pressure sensor:
The corrosion-resistant ceramic pressure sensor has no liquid transfer, the pressure acts directly on the front surface of the ceramic diaphragm, causing a slight deformation of the diaphragm. The thick film resistor is printed on the back of the ceramic diaphragm and connected into a Wheatstone bridge. Bridge), due to the piezoresistive effect of the varistor, the bridge produces a highly linear voltage signal proportional to the pressure, which is proportional to the excitation voltage. The standard signal is calibrated to 2.0 / 3.0 / 3.3 depending on the pressure range. mV/V, etc., compatible with strain gauge sensors. With laser calibration, the sensor has high temperature stability and time stability. The sensor comes with temperature compensation of 0 to 70 ° C and can be in direct contact with most media.
Ceramic is a recognized material that is highly elastic, resistant to corrosion, abrasion, shock and vibration. The thermal stability of ceramics and its thick film resistance allow it to operate over a temperature range of -40 to 135 ° C, with high precision and high stability. The degree of electrical insulation is >2kV, the output signal is strong, and the long-term stability is good. High-performance, low-priced ceramic sensors will be the development direction of pressure sensors. There is a trend to replace other types of sensors in Europe and the United States. More and more users in China use ceramic sensors instead of diffused silicon pressure sensors.
The semiconductor piezoelectric impedance diffusion pressure sensor forms a semiconductor deformation pressure on the surface of the sheet, and deforms the sheet by an external force (pressure) to generate a piezoelectric impedance effect, thereby converting the impedance change into an electrical signal. The capacitance type pressure sensor converts a fixed electrode of glass and a movable electrode of silicon to form a capacitance, and converts a change in electrostatic capacitance generated by deformation of a movable pole by an external force (pressure) into an electrical signal. (E8Y's operating principle is the electrostatic capacity mode, and other models use the semiconductor method).



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